JPH0554053B2 - - Google Patents

Info

Publication number
JPH0554053B2
JPH0554053B2 JP59019703A JP1970384A JPH0554053B2 JP H0554053 B2 JPH0554053 B2 JP H0554053B2 JP 59019703 A JP59019703 A JP 59019703A JP 1970384 A JP1970384 A JP 1970384A JP H0554053 B2 JPH0554053 B2 JP H0554053B2
Authority
JP
Japan
Prior art keywords
force
signal
semiconductor element
diaphragm
thick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59019703A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60164231A (ja
Inventor
Kazuji Yamada
Shigeyuki Kobori
Hiroji Kawakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1970384A priority Critical patent/JPS60164231A/ja
Publication of JPS60164231A publication Critical patent/JPS60164231A/ja
Publication of JPH0554053B2 publication Critical patent/JPH0554053B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP1970384A 1984-02-06 1984-02-06 力分布検出器 Granted JPS60164231A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1970384A JPS60164231A (ja) 1984-02-06 1984-02-06 力分布検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1970384A JPS60164231A (ja) 1984-02-06 1984-02-06 力分布検出器

Publications (2)

Publication Number Publication Date
JPS60164231A JPS60164231A (ja) 1985-08-27
JPH0554053B2 true JPH0554053B2 (en]) 1993-08-11

Family

ID=12006630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1970384A Granted JPS60164231A (ja) 1984-02-06 1984-02-06 力分布検出器

Country Status (1)

Country Link
JP (1) JPS60164231A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4745812A (en) * 1987-03-25 1988-05-24 The United States Of America As Represented By The Secretary Of The Army Triaxial tactile sensor
EP0625701A1 (en) * 1987-04-24 1994-11-23 Enplas Laboratories, Inc. Force detector using piezoresistive elements
WO2013114291A1 (en) * 2012-01-30 2013-08-08 Pst Sensors (Proprietary) Limited Thermal imaging sensors
WO2014008377A1 (en) * 2012-07-05 2014-01-09 Ian Campbell Microelectromechanical load sensor and methods of manufacturing the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022797B2 (ja) * 1977-10-21 1985-06-04 株式会社豊田中央研究所 物理量分布表示装置
JPS5780532A (en) * 1980-11-07 1982-05-20 Hitachi Ltd Semiconductor load converter
JPS6090696A (ja) * 1983-10-25 1985-05-21 オムロン株式会社 圧覚センサ

Also Published As

Publication number Publication date
JPS60164231A (ja) 1985-08-27

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